| 摘要 |
PURPOSE: A substrate cleaning device including a contactless clean part is provided to prevent a substrate from being rolled by applying a guide roll part to the upper and lower surfaces of the substrate. CONSTITUTION: A bottom suction unit (140) sucks dust which is floated by a bottom cleaner (130). A guide roll part (50) is rotated around a roll axis. The guide roll part guides the substrate to pass between a top cleaner (110) and the bottom cleaner. A driving unit rotates the guide roll part. The driving unit is fixed to a frame. |
