| 摘要 |
PROBLEM TO BE SOLVED: To improve guide mark position accuracy while suppressing the occurrence of a processed foreign substance and preventing an incorrect alignment caused by a burr, by installing a guide mark capable of aligning a surface layer with an inner layer on the surface layer without using a drill.SOLUTION: In a guide mark installation device, an exposure device and the manufacturing method for a multilayer wiring board using the same, there are provided: X-ray observation means for observing an inner layer conductor of the multilayer wiring board from the surface layer side; image processing means for processing an image obtained by the X-ray observation means; using the image processing means, reference position determination means for determining the reference position of the inner layer conductor; and UV spot irradiation means for spot radiating UV light on the surface layer of the multilayer wiring board at a position corresponding to the reference position. |
