| 发明名称 |
Structure and Method for Placement, Sizing and Shaping of Dummy Structures |
| 摘要 |
A chip includes a number a plurality of functional areas of a layer and a number of dummy structures within the layer. The dummy structures are spaced from the functional areas. Each dummy structure has a size that is a function of the size and density of the functional areas.
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| 申请公布号 |
US2013267048(A1) |
申请公布日期 |
2013.10.10 |
| 申请号 |
US201313907449 |
申请日期 |
2013.05.31 |
| 申请人 |
INFINEON TECHOLOGIES AG |
发明人 |
SCHMIDT SEBASTIAN;SCHAFBAUER THOMAS;LIU HANG YIP;WEI YAYI |
| 分类号 |
H01L21/66;G06F17/50;H01L21/027;H01L21/3105;H01L21/321;H01L21/762;H01L21/82 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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