Carrier roller for use in vacuum substrate processing system for processing e.g. architectural glass, has compression spring arranged between roller portion and disc elements, so that external force is exerted upon disc-elements

摘要

The carrier roller has a hollow cylindrical roller portion (2) whose ends are attached with respective metallic end caps (1). Equally-spaced disc-elements (5) are arranged on the cylindrical outer surface of the roller portion. A compression spring (3) is arranged between the roller portion and disc elements, so that an external force is exerted upon the disc-elements in the axial direction of the roller portion. An independent claim is included for vacuum substrate processing system.