Particle sensor for detection of electrically conductive particles, has base body with heating structure for heating one electrode and one electrode structure

摘要

The particle sensor (10) has an electrode structure (14) with an electrode (12) and another electrode structure (18) with another electrode (16), where the electrode structures are arranged on an electrically insulating base body (22) made of silicon dioxide. An electric potential difference is generated between the electrodes of the electrode structures, where the base body has a heating structure (28) for heating former electrode and latter electrode structure. A homogenization area is provided for homogenization of the temperature of the base body surrounded by the heat structure. An independent claim is included for a method for producing a particle sensor.