| 摘要 |
PURPOSE: A substrate processing device and a lift pin connecting method improve the connection stability of a lift pin body and a weight ring by installing multiple weight rings on each lift pin body through a double connection structure. CONSTITUTION: A substrate plate (120) is located inside a reaction chamber (100). A substrate (130) is laid on the upper part of the substrate plate. A lifting unit (125) is installed on the lower part of the substrate plate. Multiple lift pin units (140) include a lift pin body (141) and multiple weight rings (143, 147) combined with the lift pin body. The lift pin body moves the substrate vertically according to the lifting movement of the substrate plate. |
