发明名称 |
MEMS Device and Method of Making a MEMS Device |
摘要 |
A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.
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申请公布号 |
US2013264663(A1) |
申请公布日期 |
2013.10.10 |
申请号 |
US201213439729 |
申请日期 |
2012.04.04 |
申请人 |
DEHE ALFONS;WURZER MARTIN;HERZUM CHRISTIAN;INFINEON TECHNOLOGIES AG |
发明人 |
DEHE ALFONS;WURZER MARTIN;HERZUM CHRISTIAN |
分类号 |
H01L29/84;H01L21/02 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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