APPARATUS FOR PRODUCING FERROELECTRIC FILM AND METHOD FOR PRODUCING FERROELECTRIC FILM

摘要

[Problem] To provide an apparatus for producing a ferroelectric film and a method for producing a ferroelectric film, wherein the ferroelectric film has high single orientation or high preferred orientation even if the ferroelectric film is formed using a sol-gel method. [Solution] One embodiment of the present invention is a method for producing a ferroelectric film, which is characterized in that: an amorphous film (16) containing a ferroelectric material is formed on a substrate using a sol-gel method; a ferroelectric film is formed by oxidizing and crystallizing the amorphous film (16) by heating the amorphous film (16) in an oxygen atmosphere, while having a seed crystal member (13) in contact with the amorphous film (16); and then the seed crystal member (13) is separated from the ferroelectric film.