| 摘要 |
<p>PURPOSE: A heat treatment apparatus is provided to improve cooling efficiency by forming a step part with a stair-shaped structure. CONSTITUTION: A receiving unit receives a substrate (W). The receiving unit includes a support pin, an opening part (2a), and an exhaust port (5). The support pin horizontally supports the substrate. An atmospheric gas is horizontally inputted from the outside through the opening part. The atmospheric gas is discharged through the exhaust port.</p> |
