| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measurement device capable of accurately measuring the temperature of a temperature measuring target even in the case of a temperature measuring target of a very small area haing a small heat capacity.SOLUTION: A control device 34 adjusts output current i output from a power supply device 32 to target side temperature measuring means 20 so that heat radiator side temperature detection means 22 can be in a thermally balanced state. When a temperature between a heat radiator 24 and a temperature measuring target 12 is maintained equal to a constant temperature, the temperature of the temperature measuring target 12 can be indirectly measured by the heat radiator 24 side. When a temperature measurement resistor having known temperature characteristics is used as a resistor 26, a corresponding temperature is calculated from the temperature characteristics. |
