发明名称 GLASS SUBSTRATE WITH THROUGH ELECTRODE AND METHOD FOR PRODUCING GLASS SUBSTRATE WITH THROUGH ELECTRODE
摘要 <p>A glass substrate with a through electrode, which comprises: a glass substrate that has first and second surfaces, and a plurality of through holes penetrating from the first surface to the second surface; and a metal layer that is electrically connected from the first surface to the second surface of the glass substrate. This glass substrate with a through electrode is characterized in that: the metal layer has a first portion that is arranged on the lateral surfaces of the through holes; and resin layers are arranged between the first portion and the lateral surfaces of the through holes.</p>
申请公布号 WO2013150940(A1) 申请公布日期 2013.10.10
申请号 WO2013JP59051 申请日期 2013.03.27
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 TAKAHASHI, SHINTARO
分类号 H01L23/15;H01L23/32;H05K1/11;H05K3/40 主分类号 H01L23/15
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