METHOD AND APPARATUS FOR AUTOMATIC OPTICAL INSPECTION OF FLAT PANEL SUBSTRATES

摘要

According to the present invention, a method for the automatic optical inspection of flat panel substrates comprises the steps of: imaging a portion of the substrate and generating a reference image on the basis of unit images, each of which is a cell layout pattern periodically and repeatedly existing in the captured image; comparing each unit image with the reference image to determine the presence of a defect, and, if a defect is present on the substrate, acquiring information on the position of the defect; and outputting the acquired information on the position of the defect.