METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT-EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor light-emitting element with high reliability and an excellent light distribution property.SOLUTION: A method for manufacturing a semiconductor light-emitting element having an electrode 50 arranged adjacent to a second convex region and composed of an electrode material comprises the steps of: forming a semiconductor laminate 40 having a light-emitting layer between an n-type semiconductor layer and a p-type semiconductor layer; forming a resist 120 having an opening so as to surround an electrode formation schedule region of one semiconductor layer surface on which a light extraction surface of the semiconductor laminate 40 is formed so that the opening is blocked toward a lamination direction of the resist; laminating the electrode material on the resist so that a flange part 50a is formed on the semiconductor layer surface; removing the resist; and forming a first convex region 80 having a first convex part on the semiconductor layer surface and a second convex region 90 having a second convex part lower than the first convex part in a region exposed as a result of removing the flange part by etching the semiconductor layer surface and the flange part after the resist removal step.