| 摘要 |
PROBLEM TO BE SOLVED: To configure a substrate inspection device at a low cost without making a space for installing an optical system unit movement mechanism of the substrate inspection device larger.SOLUTION: As an optical system unit movement mechanism for moving optical system means 3 upon inspection, the substrate inspection device uses driving means 5 that consists of a rack and pinion mechanism. A rack part 17 is provided in the vicinity of and in parallel with a linear guide 7b. A pinion part 19 is attached to an output shaft of a motor 18 provided in a side surface leg part of a portal-type gantry structure. Further, the rack part is configured as an elongated rack consisting of jointed structures 17a to 17e of a plurality of racks. Pinions attached to output shafts of two motors 18a and 18b are respectively engaged with respect to the elongated rack, and the optical system means 3 is smoothly moved even when the optical system means 3 moves through a gap among the racks. |
