发明名称 LIQUID CRYSTAL DISPLAY DEVICE
摘要 A method of manufacturing, with high mass productivity, liquid crystal display devices having highly reliable thin film transistors with excellent electric characteristics is provided. In a liquid crystal display device having an inverted staggered thin film transistor, the inverted staggered thin film transistor is formed as follows: a gate insulating film is formed over a gate electrode; a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film; a buffer layer is formed over the microcrystalline semiconductor film; a pair of source and drain regions are formed over the buffer layer; and a pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.
申请公布号 US2013265518(A1) 申请公布日期 2013.10.10
申请号 US201313909398 申请日期 2013.06.04
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;SUZUKI YUKIE;KUWABARA HIDEAKI;KIMURA HAJIME
分类号 G02F1/1368 主分类号 G02F1/1368
代理机构 代理人
主权项
地址