发明名称 TRAY FOR HIGH TEMPERATURE PROCESS
摘要 <p>PURPOSE: A tray for a high temperature process is provided to prevent damage of loaded items due to thermal deformation or an external force while being transferred. CONSTITUTION: A tray for a high temperature process comprises a tray body (3), and a supporting unit (5). The tray body is provided as a metal plate which is large or small in size according to the size of a loaded item, and an opening is capable of being formed on the surface of the plate. The supporting unit is equipped with a lower end supporting unit (10) and an upper end supporting unit (20). The lower end supporting unit supports the lower end of the loaded item to be vertically movable. The upper end supporting unit supports the upper end of the loaded item (30) to be vertically movable. The lower end support unit has a lower part guide frame, a lower part horizontal bar, and multiple lower part vertical bars.</p>
申请公布号 KR20130111012(A) 申请公布日期 2013.10.10
申请号 KR20120033446 申请日期 2012.03.30
申请人 SNTEK CO., LTD. 发明人 AN, KYOUNG JOON;JUNG, SUNG HUN;PARK, KANG IL;BAE, JEONG WOON;BAEK, JU YEOUL;CHOI, SANG DAE
分类号 C23C14/50;C23C14/35;H01L21/673;H01L21/677 主分类号 C23C14/50
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