发明名称 NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a nitride semiconductor light-emitting device that achieves uniformity of characteristics within a wafer surface and improves the yield.SOLUTION: A substrate 10 includes a defect concentration region 11 and a low defect region 12 that is a region excluding the defect concentration region 11. Only in the low defect region 12, a trench region 14b that is deeper than the surface of the low defect region 12 is formed in one side of the defect concentration region 11.
申请公布号 JP2013211596(A) 申请公布日期 2013.10.10
申请号 JP20130141408 申请日期 2013.07.05
申请人 SHARP CORP;SUMITOMO ELECTRIC IND LTD 发明人 KAMIKAWA TAKESHI;KANEKO YOSHIKA;MOTOKI KENSAKU
分类号 H01S5/22;H01L21/205;H01S5/343 主分类号 H01S5/22
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