DRIVING DEVICE, STAGE DEVICE, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a driving device capable of operating a motor at a high speed.SOLUTION: The driving device of the present invention includes: a threshold table correlatedly holding a period for driving a motor and a threshold value indicating the magnitude of a current that is permissible to pass to the motor according to the period; a current sensor detecting a current flowing through the motor; an overload determination circuit comparing the current detected by the current sensor with the threshold value that is set according to the period, and detects an overload to the motor on the basis of the comparison result; and a driving section driving the motor on the basis of the overload detected by the overload determination circuit.