HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND RECORDING MEDIUM

摘要

PURPOSE: A heat treatment system, a heat treatment method, and a recording medium are provided to improve the reproducibility of a heat treatment by controlling the temperature of a heater in consideration of the power of the heater. CONSTITUTION: A model memory unit (51) memorizes a heat treatment change model. The heat treatment change model shows a relation between the temperature change of a processing chamber and the result change of a heat treatment. A heat treatment result receiving unit receives information about a target heat treatment result and a heat treatment result in a heat treatment condition which is memorized by a heat treatment condition memory unit. An optimal temperature calculating unit calculates an optimal temperature for the target heat treatment result. [Reference numerals] (51) Model memory unit; (52) Recipe memory unit; (55) I/O port; (58) Operation panel