发明名称 VIBRATOR ELEMENT, MANUFACTURING METHOD OF VIBRATOR ELEMENT, SENSOR UNIT, AND ELECTRONIC APPARATUS
摘要 A vibration gyro-element includes a base portion, an excitation vibrating arm and a detection vibrating arm extending from the base portion, and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is out of phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein an amplitude of the output signal of the first adjustment vibrating arm is larger than an amplitude of the output signal of the second adjustment vibrating arm.
申请公布号 US2013264908(A1) 申请公布日期 2013.10.10
申请号 US201313856620 申请日期 2013.04.04
申请人 SEIKO EPSON CORPORATION 发明人 MATSUO ATSUSHI
分类号 H01L41/107;H01L41/047;H01L41/25 主分类号 H01L41/107
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