SUBSTRATE TREATING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to uniformly process both sides of a substrate by simultaneously spraying processing solutions to both sides of the substrate. CONSTITUTION: A fixing device fixes an endless belt (7). A substrate is transferred by the endless belt. The endless belt is wound between a pair of pulleys (41). Processing solutions are supplied from a processing tank to both sides of the substrate. Both sides of the substrate are simultaneously rinsed by a rinsing tank (4).