发明名称 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD OF THE SAME
摘要 A semiconductor structure and a manufacturing method of the same are provided. The semiconductor structure includes a base, a stacked structure and a doped layer. The stacked structure is formed on the base, wherein the stacked structure comprises a plurality of conductive strips and a plurality of insulating strips, one of the conductive strips is located between adjacent two insulating strips, the stacked structure has a first side wall, and a long edge of the first side wall is extended along a channel direction. The doped layer is formed in the first side wall, wherein the doped layer is formed by an ion implantation applied to the first side wall, and an acute angle is contained between an implantation direction of the ion implantation and the first side wall.
申请公布号 US2013264683(A1) 申请公布日期 2013.10.10
申请号 US201213443417 申请日期 2012.04.10
申请人 CHEN SHIH-HUNG;LUE HANG-TING;HSIEH KUANG-YEU;MACRONIX INTERNATIONAL CO., LTD. 发明人 CHEN SHIH-HUNG;LUE HANG-TING;HSIEH KUANG-YEU
分类号 H01L29/00;H01L21/56 主分类号 H01L29/00
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