METHOD FOR DETECTING PIN HOLE USING ATMOSPHERIC PRESSURE PLASMA

摘要

PURPOSE: A method for detecting pin holes using atmospheric pressure plasma is provided to have a simple detecting process using the low-temperature plasma at atmospheric pressure and to highly reduce detecting costs. CONSTITUTION: A method for detecting pin holes using atmospheric pressure plasma is as follows: a step of generating plasma flames at an atmospheric plasma device; a step of injecting the plasma flames to the surface of a detected target (200); and a step of detecting the physical variation of the plasma flames through the pin holes or cracks of the detected target to determine whether or not the pin holes or the cracks exist in the detected target. A conductive substrate is contacted to the underside of the detected target. The physical variation is current or voltage variation caused on the conductive substrate by the plasma flames. [Reference numerals] (110) Power supply device; (120) Plasma reaction gas; (130) Detecting unit; (140) Determining unit; (150) Scan device