HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND RECORDING MEDIUM

摘要

PURPOSE: A heat treatment system, a heat treatment method, and a recording medium are provided to easily control a temperature by inputting changed temperatures to first to fifth zones. CONSTITUTION: A heat treatment condition memory unit memorizes a heat treatment condition according to the processing content. A model memory unit (51) memorizes a model which shows a relation between the temperature change of a processing chamber and the power change of a heating device. A changed temperature receiving unit receives information about the temperature change of the processing chamber. A power calculating unit calculates the power of the heating device. A CPU (56) determines whether the power of the heating device is saturated or not. [Reference numerals] (51) Model memory unit; (52) Recipe memory unit; (55) I/O port; (58) Operation panel