| 摘要 |
<p>A ceramic heater element 10 includes an insulating substrate 101, and a heating resistor 102 embedded in the insulating substrate 101. The insulating substrate 101 contains a main phase formed of ²-SiAlON or a multiphase SiAlON of ²-SiAlON and ±-SiAlON; a grain boundary phase containing a rare earth element; and a silicide of at least one species selected from among Cr, W, Mo, V, and Fe. The heating resistor 102 contains a main phase formed of an electrically conductive compound containing at least one species selected from among silicide, nitride, and carbide of Mo, and silicide, nitride, and carbide of W; ²-SiAlON or a multiphase SiAlON of ²-SiAlON and ±-SiAlON; and a grain boundary phase containing a rare earth element.</p> |
