| 摘要 |
A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (10) (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer (14, 16) having a mutually different thermal expansion coefficient, the method comprising the steps of
- controllably causing (S1) a temperature distribution along the cantilever,
- measuring (S2) a spatial state of the cantilever,
- computing (S3) a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented. |
