发明名称
摘要 A projection optical system of the present invention includes an optical element group that includes optical elements, and a controller that drives at least one of the first optical elements. The optical element group includes aspheric surfaces having a complementary relationship with each other and are arranged so that the aspheric surfaces face each other. The controller changes a relative position between the optical elements in a first direction and a second direction orthogonal to the first direction to control optical performances of the projection optical system corresponding to each of the first direction and the second direction.
申请公布号 JP5312058(B2) 申请公布日期 2013.10.09
申请号 JP20090009334 申请日期 2009.01.19
申请人 发明人
分类号 H01L21/027;G02B13/08;G02B13/24;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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