发明名称 Wire for semiconductor wire saw and wire saw
摘要 <p>A wire (200) is provided that is adapted for sawing semiconductor material (102; 104; 106; 108), wherein the wire includes a non-circular cross section. Furthermore, a wire guide (112, 114, 116, 118) adapted for guiding the wire (200) for sawing semiconductor material (102, 104, 106, 108) as described is provided. The wire guide comprising at least one groove that includes a rectangular or trapezoidal cross-section.</p>
申请公布号 EP2647458(A1) 申请公布日期 2013.10.09
申请号 EP20120163224 申请日期 2012.04.04
申请人 APPLIED MATERIALS SWITZERLAND SARL 发明人 NASCH, PHILIPPE
分类号 B23D61/18 主分类号 B23D61/18
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