| 摘要 |
<p>PURPOSE: An electronically controllable mixing valve and an apparatus for manufacturing a semiconductor using the same are provided to feed recirculated oil using the same capable of sliding or rotating, thereby controlling the temperature of a chuck base. CONSTITUTION: An electronically controllable mixing valve (200) includes a lower region (210), an upper region (220), and a central region (230). The lower region has multiple through-holes and inlet ports at the bottoms of the respective through-holes. The upper region has multiple openings and one outlet port (221). The openings face the through-holes, and the outlet port is formed at the upper side of the upper region. The central region has one through-hole (231) which allows the upper region and the lower region to mutually communicate. The through-hole of the central region slides against the through-holes of the lower region so that one through-hole of the lower region communicates with the opening corresponding to the one through-hole, and so that the opening not corresponding to the one through-hole is blocked. The through-hole of the central region is driven by a stepping motor (240) so that the same slides.</p> |
