| 摘要 |
PURPOSE: A capacitor and a forming method thereof prevent bridges between lower electrodes of the capacitors by forming the uniform thickness of a reflectionless coating layer. CONSTITUTION: A first conductive layer, a dielectric film, a second conductive layer, and a hard mask are formed on a substrate (10). A hard mask pattern (50A) and an upper electrode (40A) having sloped side walls are formed by etching the hard mask and the first conductive layer. A spacer (60A) is formed on each of the sloped side walls of the hard mask pattern and the upper electrode. A lower electrode (20A) is formed by etching the dielectric film and the second conductive layer. Each of the sloped side walls of the hard mask pattern and the upper electrode is 45 to 85°. |
