| 摘要 |
PURPOSE: A laser process method is provided to form a uniform reforming layer in a subject regardless of the condition of the irradiated surface of a subject subjected to irradiation with laser beam. CONSTITUTION: A laser process method performs the following steps of: detecting the reflectance of laser beam (L) on the irradiated surface of a subject (1) subjected to irradiation with laser beam; forming a reflection prevention film (5) on the surface of the subject based on the detected reflectance; forming the irradiated surface to have the reflectance less than the fixed reflectance. The irradiated subject is irradiated with the laser beam having the wavelength with the transparency, the refining layer is formed in the subject. |
