发明名称 |
Positioning apparatus, a substrate processing apparatus and method for fixing a reference member |
摘要 |
Provided is a positioning apparatus including: a reference member that is serving as a reference for positioning; a support part that supports the reference member; and a first fixing member provided on the support part that fixes the reference member and the support part or releases the fixing. The reference member is connected to the support part in a movable state and fixed to the support part by the first fixing member after a position is determined. The reference member of the positioning apparatus is precisely installed to a reference position.
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申请公布号 |
US8550470(B2) |
申请公布日期 |
2013.10.08 |
申请号 |
US201113104428 |
申请日期 |
2011.05.10 |
申请人 |
AMANO YOSHIFUMI;KANEKO SATOSHI;TOKYO ELECTRON LIMITED |
发明人 |
AMANO YOSHIFUMI;KANEKO SATOSHI |
分类号 |
B23B31/28 |
主分类号 |
B23B31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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