发明名称 Methods for passivating a carbonic nanolayer
摘要 Methods for passivating a carbonic nanolayer (that is, material layers comprised of low dimensional carbon structures with delocalized electrons such as carbon nanotubes and nano-scopic graphene flecks) to prevent or otherwise limit the encroachment of another material layer are disclosed. In some embodiments, a sacrificial material is implanted within a porous carbonic nanolayer to fill in the voids within the porous carbonic nanolayer while one or more other material layers are applied over or alongside the carbonic nanolayer. Once the other material layers are in place, the sacrificial material is removed. In other embodiments, a non-sacrificial filler material (selected and deposited in such a way as to not impair the switching function of the carbonic nanolayer) is used to form a barrier layer within a carbonic nanolayer. In other embodiments, carbon structures are combined with and nanoscopic particles to limit the porosity of a carbonic nanolayer.
申请公布号 US8551806(B2) 申请公布日期 2013.10.08
申请号 US20100910714 申请日期 2010.10.22
申请人 RUECKES THOMAS;MANNING H. MONTGOMERY;SEN RAHUL;NANTERO INC. 发明人 RUECKES THOMAS;MANNING H. MONTGOMERY;SEN RAHUL
分类号 H01L51/40;H01L21/20 主分类号 H01L51/40
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