| 摘要 |
<p>PURPOSE: A substrate holder for a spin coater is provided to reduce the occupation space of a spin coater system by not using a vacuum pump or a vacuum assist device. CONSTITUTION: A body (210) has an area and a thickness. A substrate holding groove (220) is formed on the central surface of the body. A vacuum assist groove (230) is installed to at least one part of the substrate holding groove. At least one vacuum induction path (240) passes through the edge of the body and the vacuum assist groove. The cross section of the vacuum induction path gradually decreases from one edge of the body to the vacuum assist groove.</p> |
