| 摘要 |
An imprint apparatus and an imprint method are provided to prevent a bubble between a stamp and the substrate by separating the substrate from an edge of the stamp. An imprint apparatus includes an external chamber(100), an internal chamber(200), a stage, and a pressure adjusting unit(500). The external chamber forms a first working space(150). The internal chamber is installed inside the external chamber, lifts a stamp(210) of a protruded shape toward a substrate(S), and forms a second working space(250). The stage is installed inside the internal chamber. The substrate is installed on the stage. The pressure adjusting unit adjusts a pressure of the first working space and the second working space. The pressure adjusting unit has a first pump(510) and an adjusting valve(530). The first pump forms a vacuum on the first working space. The adjusting valve opens and closes the second working space. |
