| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time required for ashing processing, and reduce damage on a water-repellent film 12 surrounding nozzle holes 21a, and then, enhance straight advancing stability of liquid droplets ejected from the nozzle holes 21a.SOLUTION: A method for manufacturing a nozzle plate 1 including a water-repellent film 12 on the surface of a nozzle substrate 21 in which nozzle holes 21a are formed includes: a water-repellent film forming step; a sticking step; an ashing step; and a peeling step. In the water-repellent film forming step, the water-repellent film 12 is formed by applying a water-repellent agent on a base film 11, then, heating and solidifying the water-repellent agent. In the sticking step, the base film 11 is pressurized against the nozzle substrate 21 via the water-repellent film 12 to be stuck together. In the ashing step, areas 12p opposed to the nozzle holes 21a of the nozzle substrate 21, in the water-repellent film 12 are removed with irradiation of oxygen plasma or far UV rays. In the peeling step, the base film 11 is peeled from the water-repellent film 12 after the ashing step. |
