| 摘要 |
A wafer transfer apparatus capable of improving working efficiency by simultaneously and selectively transferring a desired amount of wafers to shorten a wafer transfer time. The wafer transfer apparatus includes a plurality of wafer support members capable of supporting and transferring at least one wafer. The wafer transfer apparatus also includes a moving device connected to the wafer support members so as to move the wafer support members corresponding to a number of wafers to be transferred in such a manner that the wafer support members simultaneously transfer at least one wafer. |
