| 摘要 |
PROBLEM TO BE SOLVED: To provide a hall element which is excellent in industrial mass productivity and is easy to downsize and which can maintain high detection accuracy as a magnetic detection element by relaxing stress from a sealing material with environmental change.SOLUTION: A hall element includes a magnetosensitive part disposed in a semiconductor active layer on a semiconductor substrate. The magnetosensitive part is coated with a protective film having a buffer effect. The protective film includes a first protective film and a second protective film. The first protective film has push-in hardness of 50 GPa or less. This achieves the hall element which reduces variations in unbalanced voltage due to stress from a sealing material generated with environmental change and which is excellent in industrial mass productivity and is easy to downsize. |
