| 摘要 |
PROBLEM TO BE SOLVED: To perform a high-reliability inspection by easily canceling a positional displacement even if the positional displacement occurs in a measured object between inspection stages, in a heterogeneous substance inspecting device comprising at least two inspection stages.SOLUTION: A heterogeneous substance inspecting device 1 inspects the presence/absence of a heterogeneous substance within a main substance forming a measured object S. The heterogeneous substance inspecting device comprises candidate position measuring means which determines a candidate position of the heterogeneous substance within the measured object, means for determining an X-ray transmission amount A at the candidate position of the heterogeneous substance determined by the candidate position measuring means, means including an X-ray detection plane configured by arranging a plurality of pixels in a planar manner, and for determining an X-ray transmission amount B at least in one of a predetermined number of pixels being present around the candidate position of the heterogeneous substance determined by the candidate position measuring means among the plurality of pixels, and determination means for determining the presence of the heterogeneous substance on the basis of the X-ray transmission amount A and the X-ray transmission amount B. |
