发明名称 MARKING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a marking device capable of improving working efficiency.SOLUTION: A marking device comprises: a mark drawing section for drawing a mark on a workpiece; an image acquisition section for acquiring an image of the mark formed on the workpiece; and a control section for creating drawing data for drawing the mark on the workpiece, setting an inspection pattern for inspecting the mark formed on the workpiece, drawing the mark on the workpiece based on the created drawing data, acquiring an image at a portion corresponding to the inspection pattern to the workpiece on which the mark is drawn, and comparing the acquired image pattern and the inspection pattern.
申请公布号 JP2013206913(A) 申请公布日期 2013.10.07
申请号 JP20120070888 申请日期 2012.03.27
申请人 SEIKO EPSON CORP 发明人 YAMAGUCHI KENJI
分类号 H01L23/00;B05C11/00;B41J29/46;B41M5/00 主分类号 H01L23/00
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