CHARGED PARTICLE BEAM DRAWING DEVICE, INSPECTION DEVICE, AND METHOD FOR INSPECTING DRAWING DATA

摘要

PROBLEM TO BE SOLVED: To provide a drawing device capable of avoiding irradiating with a beam in an abnormal dose because of drawing data input in the drawing device.SOLUTION: A drawing device 100 of one embodiment comprises: a storage part 142 for storing a charge amount map which is input from the outside and defines a charge amount of a charged particle beam, for irradiating with, for each mesh area which is made by dividing a drawing area of a sample in a mesh state; a charge amount inspection part 60 for inspecting whether the charge amount defined in the charge amount map is not more than a threshold in each mesh area; and a drawing part 150 for drawing patterns on the sample by using the charged particle beam according to drawing data which are paired with the charge amount map.