Improved Device and Method of Separating Substrate, and Coating Apparatus Having the Same

摘要

PURPOSE: An improved device and a method for separating a substrate, and a coating apparatus having the same are provided to prevent breakage by facilitating the separation of a substrate. CONSTITUTION: Holes pass through an adsorption surface on a suction table. Pinholes pass through the adsorption surface. Lift pins (271) move up and down in the pinholes. The lift pins are mounted on an up-down frame (274). An air supply device (283) supplies air to the holes.