| 摘要 |
PROBLEM TO BE SOLVED: To provide a proximity exposure apparatus capable of controlling the temperature of a linear motor to suppress influence on exposure accuracy caused by expansion and contraction of a substrate.SOLUTION: A proximity exposure apparatus is equipped with: first, second, third and fourth coolant circulation paths 35, 45, 50, 60 disposed along first and second movers 32, 42; first and second coolant supply devices which supply the first, second, third and fourth coolant circulation paths 35, 45, 50, 60 with coolant in a circulating manner; and temperature sensors 36a, 46a, 51a, 61a which are disposed in the vicinity of inlet ports 35a, 45a, 50a, 60a and in the vicinity of outlet ports 35b, 45b, 50b, 60b of the first, second, third and fourth coolant circulation paths 35, 45, 50, 60, and detect temperature of coolant when flowing in and out of the first and second coolant circulation paths 35, 45. Further, temperature management is performed such that a heat quantity transmitted from a linear motor to a substrate becomes constant based on the temperature of coolant detected by the temperature sensors 36a, 46a, 51a, 61a. |
