| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure marking device capable of easily positioning a substrate and forming an alignment mark on the substrate at satisfactory accuracy.SOLUTION: An exposure marking device comprises a marking part consisting of four marking heads 16A to 16D and a substrate positioning part. The marking heads 16A to 16D are provided with positioning pins X1 to X4 to position a substrate in relation to a substrate conveyance orthogonal direction (X direction). When the substrate is positioned, the marking heads 16A to 16D are moved to touch the positioning pins X1 to X4 to a substrate edge to position the substrate automatically, and the marking heads 16A to 16D are positioned at mark formation positions. |
