RELEASE MATERIAL FOR MANUFACTURING SILICON CRYSTAL INGOT, AND METHOD FOR FORMING RELEASE MATERIAL FOR MANUFACTURING SILICON CRYSTAL INGOT

摘要

PROBLEM TO BE SOLVED: To prevent a release material from exfoliating from a container during growth of a silicon crystal by improving durability against thermal stress of the release material.SOLUTION: Slurry obtained by suspending powder of silicon nitride into aqueous solution including an organic binder is applied onto the inside wall surface of a heat-resistant container, and the slurry applied onto the heat-resistant container is heated and sintered under an inactive atmosphere. In a release material for manufacturing silicon crystal ingot formed in this way, the atomic ratio [C/Si] between carbon and silicon is ≤2.5, and the sintering density of each portion is uniform.