| 摘要 |
PROBLEM TO BE SOLVED: To provide a QCM sensor which is improved in sensitivity.SOLUTION: In a QCM sensor 10 which introduces gas to be measured from gas introduction ports 22a, 22b of a flow cell in which a crystal oscillator 12 is incorporated and exhausts the gas to be measured in contact with the surface of the crystal oscillator 12 from a gas exhausting port 24 of the flow cell 20, an angle &thetas; formed by a central axis of the gas introduction ports 22a, 22b and the surface of the crystal oscillator 12 is made within a range of 45 to 90 degrees. Thus, sensitivity of the QCM sensor can be improved. |
