CAPACITANCE TYPE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method to suppress other axis sensitivity in a capacitance type sensor in which a fixed electrode and a movable electrode are arranged facing each other across a first opposing surface and a second opposing surface orthogonal to the first opposing surface.SOLUTION: A capacitance type sensor includes a fixed electrode and a movable electrode. In the capacitance type sensor, the fixed electrode and the movable electrode are arranged facing each other across a first opposing surface and a second opposing surface orthogonal to the first opposing surface. On the second opposing surface of the capacitance type sensor, a guard electrode maintaining a constant potential is interposed between the fixed electrode and the movable electrode.