| 摘要 |
PROBLEM TO BE SOLVED: To prevent process chips from adhering to a lower surface of a planar workpiece when the planar workpiece is separated from a holding table.SOLUTION: A spinner device 1 includes seal means 5 allowing a holding surface 2a of a holding table 2 to communicate with a suction source 9. The seal means 5 includes: a rotary pipe 50 connected with a rotary shaft 4; an outer frame 51 enclosing the rotary pipe 50; and a seal member 52 disposed at a clearance between the inner side of the outer frame 51 and the outer side of the rotary pipe 50. The seal means 5 is housed in a seal case 6 composed of a side wall 6a and a bottom part 6b that enclose the outer frame 51. A supply port 8 communicating with an air supply source 10 and a suction port 7 communicating with a suction source 9 are disposed at the bottom part 6b of the seal case 6. The supply port 8 is disposed above the suction port 7. The structure prevents process chips in the seal case 6 from being blown up and adhering to a lower surface Wb of a planar workpiece W when the planar workpiece W is separated from the holding table 2. |
