发明名称 VIBRATION PIECE, MANUFACTURING METHOD OF THE SAME, GYRO SENSOR, ELECTRONIC DEVICE AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration piece capable of improving the S/N ratio of an output signal without reducing the strength of the output signal.SOLUTION: A vibration piece 15 includes vibration arms 26a, 26b for detection. The vibration arms 26a, 26b for detection are provided with electrodes 41a, 41b. Wiring 45a, 45b is connected to the electrodes 41a, 41b. The wiring 45a, 45b is arranged at a piezoelectric body of a base part 25. At least a part of the wiring 45a, 45b are electrodes 54a, 54b for adjustment. The electrodes 54a, 54b for adjustment generate electrical signals of a phase opposite to an output signal of leakage vibration of the vibration arm 26a for detection.
申请公布号 JP2013205237(A) 申请公布日期 2013.10.07
申请号 JP20120074795 申请日期 2012.03.28
申请人 SEIKO EPSON CORP 发明人 NISHIZAWA RYUTA;NAKAGAWA HIROSHI;KIKUCHI TAKAYUKI
分类号 G01C19/5607;G01C19/5628;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H03H9/02;H03H9/19 主分类号 G01C19/5607
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