VACUUM DEPOSITION DEVICE AND VACUUM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an excellent vacuum deposition device and an excellent vacuum deposition method, capable of preventing degradation in the productivity even when the size of a panel is increased.SOLUTION: A vacuum vapor deposition device for executing the vapor deposition of a luminescent material layer on a surface of a substrate to be vapor-deposited includes in a vacuum chamber 10: a cooling plate 13 in which a substrate to be vapor-deposited is mounted on its surface and held; a mask 30 to be mounted on a surface of a substrate 100 held by the cooling plate; and an evaporation source device 20 for supplying evaporated EL material in a moving mode via the mask on the surface of the substrate held by the cooling plate. The mask is fixed to a frame 33 while a mask sheet 31 formed of magnetic metal with a plurality of patterns being formed thereon is subjected to the tension. The cooling plate has a magnet 200 which attracts a part of the mask sheet to the surface of the substrate, and is moved synchronously with the movement of the evaporation source device.